Conference

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Optical Technologies and Applications in Pan-Semiconductor Processing Forum (Finished)

7th March, 2024 10:30-12:30

Technical Theatre , B2

Organizers

Informa Markets

Asia Photonics Expo(APE)

Co-organizer

Shanghai Ultra-precision Optical Manufacturing Engineering Technology Research Center, Fudan University
HongKong Applied Science and Technology Research Institute(ASTRI)

Background

With the development of science and technology, various application fields such as big data, cloud computing, Internet of Things, artificial intelligence, and consumer electronics have placed higher demands on chip performance, driving the advancement of process miniaturization and three-dimensional structures, resulting in a significant rise in the number of process steps. Consequently, the semiconductor industry continues to enhance its processes and technological capabilities to meet these ever-growing demands. Simultaneously, the application of optical technology in the pan-semiconductor processing field is progressively expanding, offering the potential for increased production efficiency and superior product quality in semiconductor manufacturing.

Within this context, Deep Ultraviolet (DUV) and Extreme Ultraviolet (EUV) lithography technologies have garnered considerable attention within the industry. These advanced optical technologies not only play an important role in lithography processing, but also involve many other optical applications. For example, critical size (CD) measurement, process overlay measurement, mask detection, process sensing, etc. In the future, we anticipate further expansion of optical technologies that can push the boundaries of semiconductor manufacturing, fostering greater innovation and transformative outcomes for the industry.

March 7, 2024, the “Optical Technologies and Applications in Pan-Semiconductor Processing Forum ” will bring together prominent companies and experts in the field of semiconductor optics to share specialized presentations from market, technology, and application perspectives. The forum will delve into topics such as the development of advanced lithography processes and equipment,

Agenda

Optical Technologies and Applications in Pan-Semiconductor Processing Forum
Time Topics Speakers
Host: Min Xu, Professor, Fudan University.

10:30-10:35

Opening

10:35-10:55

Flat lens for sub-diffraction limit focusing, imaging and lithography  Jinghua Teng, Senior Principal Scientist, Institute of Materials Research and Engineering (IMRE), A*STAR, Singapore.

10:55-11:15

High-Brightness Broadband Laser-Driven Light Sources for Semiconductor Metrology Applications Renaud Richard, Senior Scientist, Energetiq Technology Inc. 

11:15-11:35

Optical Testing for IC Manufacturing Min Xu, Professor, Fudan University.

11:35-11:55

Innovative Positioning Technology for Semiconductor Manufacturing and Wafer Inspection Amornrit (Nat) Jermwiwat, Sales Manager, Southeast Asia, PI (Physik Instrumente) Southeast Asia.

11:55-12:15

Advancements in Semiconductor Inspection: Exploring 3D IC Interconnection Analysis and AI-driven Quality Assessment Dr. Ka Yiu Wong, Senior Manager, IoT Sensing & AI Technologies Department, ASTRI, Hong Kong 

Speakers

Jinghua Teng

Senior Principal Scientist, Institute of Materials Research and Engineering (IMRE), A*STAR,

Renaud Richard

Senior Scientist of Energetiq Technology Inc.

Min Xu

Professor of Fudan University.

Amornrit (Nat) Jermwiwat

Sales Manager, Southeast Asia, PI (Physik Instrumente) Southeast Asia.

Dr. Ka Yiu Wong

Senior Manager, IoT Sensing & AI Technologies Department, ASTRI, Hong Kong

*In no particular order

Contact

Speaking and Sponsorship opportunities, please contact:
Cafiar Dai
TEL: 86-755-88242572
E-mail: Cafiar.Dai@informa.com